Surface morphology evolution of m-plane (1(1)over-bar00) GaN during molecular beam epitaxy growth: Impact of Ga/N ratio, miscut direction, and growth temperature
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منابع مشابه
Structural Properties of GaN Films Grown by Molecular Beam Epitaxy on Singular and Vicinal 6H-SiC(0001)
Gallium nitride films are grown by plasma-assisted molecular beam epitaxy (MBE) on 6HSiC(0001) substrates with no miscut and with 3.5° miscuts in both the [1 1 00] and [11 2 0] directions. The hydrogen-etched substrates display straight or chevron shaped steps, respectively, and the same morphology is observed on the GaN films. X-ray rocking curves display substantially reduced width for films ...
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Ga adlayer coverage and surface morphology evolution during GaN grown by PAMBE are studied on an atomic scale. Ga adlayer coverage, which is closely dependent on the Ga/N flux ratios, is found to be a very important factor in determining the surface morphology. A laterally contracted Ga bilayer is able to stabilize the GaN surface to produce the minimum pit density. Such an energetically favora...
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M-plane GaN thin films were grown on LiAlO2 substrates under different N/Ga flux ratios by plasma-assisted molecular beam epitaxy. An anisotropic growth of M-plane GaN was demonstrated against the N/Ga flux ratio. As the N/Ga flux ratio decreased by increasing Ga flux, the GaN surface trended to a flat morphology with stripes along [11[Formula: see text]0]. According to high-resolution X-ray di...
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M-plane GaN(1 1 00) is grown by plasma assisted molecular beam epitaxy on ZnO(1 1 00) substrates. A low-temperature GaN buffer layer is found to be necessary to obtain good structural quality of the films. Well oriented (1 1 00) GaN films are obtained, with a slate like surface morphology. On the GaN(1 1 00) surfaces, reconstructions with symmetry of c(2x2) and approximate "4×5" are found under...
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GaN is grown by plasma assisted molecular beam epitaxy on ZnO(1 1 00) substrates. Well-oriented (1 1 00) GaN surfaces are obtained, and (1 1 01) oriented facets are also observed. On the GaN(1 1 00) surfaces under Ga-rich conditions a surface reconstruction with approximate symmetry of "4×5" is found. A model is proposed in which this reconstruction consists of 2 ≥ monolayers of Ga terminating ...
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تاریخ انتشار 2016